Xe sub-atmospheric pressure storage and delivery cylinder system
摘要
Ion implantation applications for material modifications will increase the types of gases needed to accomplish the expected results. Takachiho Chemical Industrial Co. Ltd (Takachiho) is developing and testing new gases that are currently NOT commercially available in sub-atmospheric packages. Xenon is only the first gas to be introduced. Japanese high pressure gas laws restrict the use of gases for both production and development if supplied as high pressure (>1MPa). The sub-atmospheric T-ionTM package eliminates these restrictions. The T-ionTM package is safe, non-contaminating, and has the capacity necessary for most applications. If T-ionTM can deliver Xenon molecules without sacrificing performance of Xenon, this enables Xenon gas to be supplied in the sub-atmospheric form into the market commercially for the first time.
Graphical abstract