The oxygen plasma etching behavior onto diamond-like carbon coating for micro-texturing: Experimental and molecular dynamics study

In this study, the experiment and molecular dynamic simulations were used to show how oxygen plasma etching works on diamond-like carbon (DLC) for micro-texturing. On the experimental side, C–C bonds on the DLC were dissociated by the irradiated oxygen. The physical bombardment of reactive oxygen ions selectively removes the carbon atoms in the unmasked area via the generation and desorption of gaseous carbon monoxide and carbon dioxide molecules. Molecular dynamic simulation exhibits the reactivity of O₂ molecules with C atoms in the DLC. The quantity of O₂ molecules and the formation of new molecules (CO) were proven in this simulation.