<p>Diamond-like carbon (DLC) and nitrogen-doped DLC:N thin films were deposited onto orthopedic implants (Ti-6Al-4&#xa0;V) using the electron cyclotron resonance microwave power chemical vapor deposition (ECR-MPCVD) method. Raman spectroscopy revealed that the ID/IG ratio increased, and the D and G peak positions shifted toward the higher wavenumber as annealing temperature increased. DLC thin films were verified by Fourier transform infrared measurements. Nitrogen doping with N<sub>2</sub>/CH<sub>4</sub> ratios of 0.285, 0.125, and 0.5 was performed, and a prominent diamond peak was observed in the X-ray diffraction pattern for 0.125 doping concentration. Energy dispersive X-ray spectroscopy measurements confirmed the presence of nitrogen for doping N<sub>2</sub>/CH<sub>4</sub> ratios of 0.285 and 0.125. The contents of Al and V in the DLC:N thin film decreased remarkably at low nitrogen doping rates. Vicker hardness of the DLC thin films increased with annealing temperature and deposition time. DLC coating exhibits features that could make them viable for orthopedic implants.</p> Graphic Abstract <p></p>

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Elaboration of ECR-MPCVD grown diamond-like carbon thin film on orthopedic implants and the influence of nitrogen doping

  • Cüneyt Kavak,
  • Özlem Çelikel,
  • Murat Eser,
  • Orhun Ekren

摘要

Diamond-like carbon (DLC) and nitrogen-doped DLC:N thin films were deposited onto orthopedic implants (Ti-6Al-4 V) using the electron cyclotron resonance microwave power chemical vapor deposition (ECR-MPCVD) method. Raman spectroscopy revealed that the ID/IG ratio increased, and the D and G peak positions shifted toward the higher wavenumber as annealing temperature increased. DLC thin films were verified by Fourier transform infrared measurements. Nitrogen doping with N2/CH4 ratios of 0.285, 0.125, and 0.5 was performed, and a prominent diamond peak was observed in the X-ray diffraction pattern for 0.125 doping concentration. Energy dispersive X-ray spectroscopy measurements confirmed the presence of nitrogen for doping N2/CH4 ratios of 0.285 and 0.125. The contents of Al and V in the DLC:N thin film decreased remarkably at low nitrogen doping rates. Vicker hardness of the DLC thin films increased with annealing temperature and deposition time. DLC coating exhibits features that could make them viable for orthopedic implants.

Graphic Abstract