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<p>This study presents the fabrication and characterization of a MEMS-based hot arm actuator that utilizes Joule heating-induced thermal expansion for lateral displacement. The actuator was fabricated through a series of micro-fabrication processes including photolithography, e-beam evaporation, and plasma ashing. Electro-thermal and electro-thermo-mechanical characteristics were experimentally analyzed and compared with finite element analysis (FEA) simulations. The actuator demonstrated fast thermal response (~100&#xa0;μs), high repeatability, and effective displacement (&gt; 10&#xa0;μm) under low-voltage operation (&lt; 0.6&#xa0;V). These findings highlight its potential application in fast-switching optical MEMS systems.</p>

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Fabrication and electro-thermo-mechanical characterization of a hot arm actuator

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年10月31日

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  • Kibum Jung,
  • Juhee Ko,
  • Taeyeong Kim,
  • Jungchul Lee

摘要

This study presents the fabrication and characterization of a MEMS-based hot arm actuator that utilizes Joule heating-induced thermal expansion for lateral displacement. The actuator was fabricated through a series of micro-fabrication processes including photolithography, e-beam evaporation, and plasma ashing. Electro-thermal and electro-thermo-mechanical characteristics were experimentally analyzed and compared with finite element analysis (FEA) simulations. The actuator demonstrated fast thermal response (~100 μs), high repeatability, and effective displacement (> 10 μm) under low-voltage operation (< 0.6 V). These findings highlight its potential application in fast-switching optical MEMS systems.