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<p>Purification of organic impurities is critical for electronic-grade hydrogen peroxide (E-H<sub>2</sub>O<sub>2</sub>), since residual organics severely deteriorate the performance of semiconductor devices. Herein, we report a carbon-based sorbent (BAC-x) constructed via sodium metaborate (NaBO<sub>2</sub>), which shows outstanding organic impurities removal efficiency in 27.25 wt% and 38.84 wt% H<sub>2</sub>O<sub>2</sub> solutions. Structure characterizations reveal that NaBO<sub>2</sub> modification effectively tailors the surface chemical environment of activated carbon by introducing abundant surface functional groups, which act as active adsorption sites and promote chemisorption between the sorbent and organic impurities. Temkin adsorption isotherm and pseudo-second-order kinetic models confirm that surface chemical environment governs the rate-limiting adsorption step. As a result, BAC-800 exhibits an exceptional organic impurities removal efficiency of 96.28% with a residual total organic carbon (TOC) of 6.38 mg·L<sup>-1</sup> that meets the standard of E-H<sub>2</sub>O<sub>2</sub>.</p>

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Surface chemical environment regulation of carbon-based sorbent for the purification of organic impurities in H2O2

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2026年6月18日

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  • Jianguang Li,
  • Tong Wang,
  • Ziqin Chen,
  • Zhikang Bao,
  • Kang Shao,
  • Jian Zhang,
  • Feng Lin,
  • Liang Lv

摘要

Purification of organic impurities is critical for electronic-grade hydrogen peroxide (E-H2O2), since residual organics severely deteriorate the performance of semiconductor devices. Herein, we report a carbon-based sorbent (BAC-x) constructed via sodium metaborate (NaBO2), which shows outstanding organic impurities removal efficiency in 27.25 wt% and 38.84 wt% H2O2 solutions. Structure characterizations reveal that NaBO2 modification effectively tailors the surface chemical environment of activated carbon by introducing abundant surface functional groups, which act as active adsorption sites and promote chemisorption between the sorbent and organic impurities. Temkin adsorption isotherm and pseudo-second-order kinetic models confirm that surface chemical environment governs the rate-limiting adsorption step. As a result, BAC-800 exhibits an exceptional organic impurities removal efficiency of 96.28% with a residual total organic carbon (TOC) of 6.38 mg·L-1 that meets the standard of E-H2O2.