Scholarlink

<p>In modern industrial design trends featuring with integration, miniaturization, and versatility, there is a growing demand on the utilization of microstructural array devices. The measurement of such microstructural array components often encounters challenges due to the reduced scale and complex structures, either by contact or non-contact optical approaches. Among these microstructural arrays, there are still no optical measurement methods for micro corner-cube reflector arrays. To solve this problem, this study introduces a method for effectively eliminating coherent noise and achieving surface profile reconstruction in interference measurements of microstructural arrays. The proposed denoising method allows the calibration and inverse solving of system errors in the frequency domain by employing standard components with known surface types. This enables the effective compensation of the complex amplitude of non-sample coherent light within the interferometer optical path. The proposed surface reconstruction method enables the profile calculation within the situation that there is complex multi-reflection during the propagation of rays in microstructural arrays. Based on the measurement results, two novel metrics are defined to estimate diffraction errors at array junctions and comprehensive errors across multiple array elements, offering insights into other types of microstructure devices. This research not only addresses challenges of the coherent noise and multi-reflection, but also makes a breakthrough for quantitively optical interference measurement of microstructural array devices.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Measurement and Characterization of Micro Corner-Cube Reflectors Array Using Coherent Denoising Interference and Physical Model-Based Neural Network

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2025年6月9日

查看全文
  • Xinlan Tang,
  • Lingbao Kong,
  • Zhenzhen Ding,
  • Yuhan Wang,
  • Bo Wang,
  • Huixin Song,
  • Yanwen Shen

摘要

In modern industrial design trends featuring with integration, miniaturization, and versatility, there is a growing demand on the utilization of microstructural array devices. The measurement of such microstructural array components often encounters challenges due to the reduced scale and complex structures, either by contact or non-contact optical approaches. Among these microstructural arrays, there are still no optical measurement methods for micro corner-cube reflector arrays. To solve this problem, this study introduces a method for effectively eliminating coherent noise and achieving surface profile reconstruction in interference measurements of microstructural arrays. The proposed denoising method allows the calibration and inverse solving of system errors in the frequency domain by employing standard components with known surface types. This enables the effective compensation of the complex amplitude of non-sample coherent light within the interferometer optical path. The proposed surface reconstruction method enables the profile calculation within the situation that there is complex multi-reflection during the propagation of rays in microstructural arrays. Based on the measurement results, two novel metrics are defined to estimate diffraction errors at array junctions and comprehensive errors across multiple array elements, offering insights into other types of microstructure devices. This research not only addresses challenges of the coherent noise and multi-reflection, but also makes a breakthrough for quantitively optical interference measurement of microstructural array devices.