Synthesis and Electrophysical Properties of Copper Oxide Films for Gas Sensors

期刊论文
发表日期：

2024年12月1日

查看全文

E. S. Rembeza,
T. V. Svistova,
N. N. Kosheleva,
D. S. Permyakov,
M. V. Grechkina,
T. G. Menshikova,
S. A. Romasev

摘要

Abstract

Thin copper oxide films are produced by the sol-gel technique. The films have a fine-grained structure. After annealing at temperatures of 400 and 500°C, the grain size decreases. The films have high values of the gas sensitivity (resistance change of 30%) and low values of the temperature of the maximum gas sensitivity (180–190°C) to ethanol, acetone, and ammonia vapors in the air.