Resistive Memory in 2T1R Architecture Based on Si MOSFETs and Nanocomposite Memristors
摘要
A manufacturing sequence for the formation of controlled memory in the 2T1R architecture using Si MOSFETs (metal-oxide-semiconductor field-effect transistor) and memristor crossbars based on thin layers of CoFeB-LiNbO3 nanocomposite and a-LiNbO3 is developed. It is shown that when using Cu top electrodes in memristors, relatively small resistive-switching voltages and currents (2.5 V and 0.4 mA) are achieved, which are suitable for creating a memory microchip within the MPW technology service (https://mpw.miet.ru/).