A Model of Low-Energy Ions Flow Interaction with Capillary-Porous Materials
摘要
Abstract
The study investigates physical mechanisms underlying plasma-assisted modification of capillary-porous materials, such as natural leather and fur, using low-energy ion flows generated in a capacitively coupled RF discharge at intermediate pressure (13.3–133 Pa). The proposed model demonstrates that material modification occurs through three interconnected processes: interaction with low-energy ions (up to 100 eV) from the positive charge layer, ion recombination energy release, and bulk treatment effects mediated by non-self-sustained discharge inside the material’s porous structure.