Properties of Coatings Based on Cerium Dioxide Obtained by Magnetron Sputtering
摘要
Abstract—The review presents the parameters of magnetron sputtering of coatings based on cerium dioxide and their relationship to the structure and key properties of coatings. The influence of the type of target, the introduction of oxygen into the sputtering medium, changes in sputtering power, bias voltage, type of substrate, and its temperature on the structure, mechanical properties, and hydrophobicity of CeO2-based coatings are considered.