FeZrN Films: Static and Microwave Magnetic Properties

Abstract—The phase and structural state, parameters of the magnetic microstructure, and static and microwave magnetic properties of the Fe_81–74Zr_2–5N_17–21 films synthesized by reactive magnetron deposition have been studied. It has been established that, as the Zr and N contents increase, the film structure changes from the so-called mixed structure (amorphous and nanocrystalline represented by the Fe-based solid solution supersaturated with zirconium and nitrogen in the bcc modification and the fcc nitride phase) to the X-ray amorphous one. The interplay of the static magnetic properties and the parameters of the stochastic magnetic structure with the effective real permeability μ' at frequencies of up to 3 GHz has been examined. It is shown that the stochastic magnetic structure determines the dynamic magnetic properties.