Composition of Impurities of Germanium Tetrafluoride: A Gas Chromatography–Mass Spectrometry Study

The compositions of impurities of GeF₄ with natural isotopes and GeF₄ enriched isotopically were studied for the first time with a chromatography-mass spectrometry on adsorption capillary columns. Their preliminary cryogenic concentration is proposed to identify impurity substances. The data on the composition of impurities of germanium tetrafluoride with various isotopes are expanded. Permanent gases, C₃–C₉ saturated and unsaturated hydrocarbons, freons, alkylfluorosilanes, fluorochlorogermanes, silicon tetrafluoride, and germanium tetrachloride are found. In total 32 impurity substances were identified, 29 of which were detected for the first time.