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Abstract <p>Ti/CrN/TiN coatings were deposited by cathodic arc deposition at substrate bias voltages ranging from 20 to 60 V. The study examined the effect of bias voltage on the topography and the mechanical and corrosion properties of the coatings using laser and scanning electron microscopy, X-ray diffraction, nanohardness testing equipment and electrochemical testing. The results show that bias voltage significantly affects the morphology of Ti/CrN/TiN coatings. With an increase in bias voltage from 20 to 60 V, the concentration of macroscopic defects decreased significantly, and average surface roughness <i>R</i><sub>a</sub>, measured by the contact method, decreased from 0.227 to 0.179 μm per 4 mm of length. Nanoindentation showed that coatings deposited at a bias voltage of 60 V have maximum hardness and elastic modulus. Corrosion tests in 3.5 wt % NaCl solution showed that coatings deposited at 20- and 40-V bias voltages had better corrosion resistance than coatings deposited at 60 V, probably due to a denser microstructure acting as a barrier to the diffusion of aggressive substances.</p>

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Topography, Mechanical Performance, and Corrosion Resistance of Multilayer Ti/CrN/TiN Coatings Prepared by Cathodic Arc Deposition under Varying Substrate Bias

  • 期刊论文

  • 发表日期：

    2025年6月1日

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  • Wu Van Huy,
  • N. B. Rodionov,
  • V. A. Karpov,
  • Ngo Thanh Binh,
  • Nguyen Dang Khoa,
  • Vu Thi Lan Vi

摘要

Abstract

Ti/CrN/TiN coatings were deposited by cathodic arc deposition at substrate bias voltages ranging from 20 to 60 V. The study examined the effect of bias voltage on the topography and the mechanical and corrosion properties of the coatings using laser and scanning electron microscopy, X-ray diffraction, nanohardness testing equipment and electrochemical testing. The results show that bias voltage significantly affects the morphology of Ti/CrN/TiN coatings. With an increase in bias voltage from 20 to 60 V, the concentration of macroscopic defects decreased significantly, and average surface roughness Ra, measured by the contact method, decreased from 0.227 to 0.179 μm per 4 mm of length. Nanoindentation showed that coatings deposited at a bias voltage of 60 V have maximum hardness and elastic modulus. Corrosion tests in 3.5 wt % NaCl solution showed that coatings deposited at 20- and 40-V bias voltages had better corrosion resistance than coatings deposited at 60 V, probably due to a denser microstructure acting as a barrier to the diffusion of aggressive substances.