A Fast and Accurate Tool for Calculation of Characteristics of Capacitive Micromachined Ultrasound Transducers (CMUT)

A new methodology for calculation of technical characteristics of electrostatic transducers has been developed, particularly, for capacitive micromachined ultrasound transducers (CMUT). It is based on a representation of the transducer as a flat capacitor with isotropic monolayer movable plate. Its displacement profile is calculated throughout superposition of its eigenmode responses to an applied voltage. The calculated displacement is used for determination of acoustic pressure in far-filed of an array of the similar transducers, vibrating in phase. Such a methodology makes it possible to calculate the frequency response and the radiation pattern even for a huge array of cells. It shows good accuracy in comparison to the finite element method (FEM), but is faster by an order of two.