Study of the Influence of Topological Parameters of the Photosensitive Element in a Second Generation Photodetector Device on the Measurement Error of the Frequency-Contrast Characteristics of Lenses
摘要
Abstract
The effect of topological parameters of a second-generation photodetector device (PDD) on the measurement error of the frequency-contrast characteristic (FCC) of the lens when measuring the image quality of the lens has been studied. Theoretical studies have been carried out by mathematical modeling for diffraction-quality scattering spots and matrix PDDs with different photoelectric coupling coefficients at different distribution functions of the sensitivity of the photosensitive element (PSE).