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Abstract <p>The results of the measurements of the roughness and longitudinal piezoelectric modulus <i>d</i><sub>33</sub> of aluminum nitride films of different thicknesses obtained by vacuum magnetron sputtering are reported. The characteristics of the synthesized films are described and atomic force microscopy images of the film surface morphology are presented. It is shown that the roughness of the obtained films decreases when a nucleation layer is formed from molybdenum and the piezoelectric moduli <i>d</i><sub>33</sub> of the two materials are similar.</p>

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Atomic Force Microscopy Study of the Physical Properties of Aluminum Nitride Thin Films

  • 期刊论文

  • 发表日期：

    2025年1月1日

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  • V. I. Strunin,
  • L. V. Baranova,
  • N. A. Davletkil’deev,
  • A. Yu. Kuklev,
  • N. A. Chirikov

摘要

Abstract

The results of the measurements of the roughness and longitudinal piezoelectric modulus d33 of aluminum nitride films of different thicknesses obtained by vacuum magnetron sputtering are reported. The characteristics of the synthesized films are described and atomic force microscopy images of the film surface morphology are presented. It is shown that the roughness of the obtained films decreases when a nucleation layer is formed from molybdenum and the piezoelectric moduli d33 of the two materials are similar.