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<p>An Erratum to this paper has been published: https://doi.org/10.1134/S1063784226010019</p>

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Erratum to: Study of the Influence of the Energy of Argon Ions on the Surface Roughness of the Main Sections of Single-Crystal Silicon

  • 期刊论文

  • 发表日期：

    2026年1月1日

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  • M. S. Mikhailenko,
  • A. E. Pestov,
  • A. K. Chernyshev,
  • M. V. Zorina,
  • N. I. Chkhalo,
  • N. N. Salaschenko

摘要

An Erratum to this paper has been published: https://doi.org/10.1134/S1063784226010019