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Investigation of the Properties of Multilayer Mirrors Based on a Pair of Materials Mo/B4C

  • R. A. Shaposhnikov,
  • S. A. Garakhin,
  • K. V. Durov,
  • V. N. Polkovnikov,
  • N. I. Chkhalo

摘要

Abstract

The properties of Mo/B4C multilayer X-ray mirrors with periods of 3.74–3.84 nm are studied in this work. The dependences of the transmission band, reflection coefficient and the magnitude of internal stresses in mirrors on the ratio of material thicknesses in the period were investigated. The results of a study of the effect of thermal annealing on the structural parameters and reflective characteristics of mirrors are also presented in the paper.