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Gradient Layers in a Four-Component Al–Ga–As–Sn System Growth by Liquid-Phase Epitaxy

  • N. S. Potapovich,
  • V. P. Khvostikov,
  • O. A. Khvostikova,
  • A. S. Vlasov

摘要

Abstract

The growth of thick (more than 50 μm) AlxGa1 – xAs gradient layers in the Al–Ga–As–Sn system has been modeled. Sn-doped AlxGa1 – xAs layers up to 85 μm thick were obtained by liquid-phase epitaxy. The obtained experimental profiles of the AlxGa1 – xAs composition gradient satisfy the used theoretical model for the cases of growth from a limited volume of a solution–melt.