Gradient Layers in a Four-Component Al–Ga–As–Sn System Growth by Liquid-Phase Epitaxy
摘要
Abstract
The growth of thick (more than 50 μm) AlxGa1 – xAs gradient layers in the Al–Ga–As–Sn system has been modeled. Sn-doped AlxGa1 – xAs layers up to 85 μm thick were obtained by liquid-phase epitaxy. The obtained experimental profiles of the AlxGa1 – xAs composition gradient satisfy the used theoretical model for the cases of growth from a limited volume of a solution–melt.