Diamond–Carbide–Silicon Composite “Skeleton” as a Promising Material for X-Ray Optical Substrates

期刊论文
发表日期：

2024年3月1日

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M. V. Zorina,
M. S. Mikhailenko,
A. E. Pestov,
M. N. Toropov,
A. K. Chernyshev,
N. I. Chkhalo,
S. K. Gordeev,
V. V. Vitkin

摘要

Abstract

The paper proposes the use of diamond–carbide–silicon composite „Skeleton“® coated with amorphous silicon as substrates for multilayer X-ray mirrors for powerful synchrotron radiation sources (3+ and 4th generation). The surfaces with the following parameters were obtained using standard deep polishing methods: flatness at the level of RMS_90% = 54.2 nm; effective roughness σ_eff ~ 1.0 nm; high-frequency roughness σ_{2 × 2} ~ 0.1 nm.