Effect of Substrate Misorientation on the Properties of p-HEMT GaAs-Based Nanoheterostructures Formed during MOCVD Epitaxy
摘要
As one of the approaches to improve p-HEMT, we studied the effect of misorientation of GaAs substrates on the surface morphology, structure, and electrical properties of pseudomorphic heterostructures, as well as the parameters of transistors based on them. In a single technological cycle, heterostructures were formed on vicinal substrates with (100) orientation and misoriented by 2° to (110) by the method of MOCVD (MOCVD) in a single technological cycle. It has been established that on misoriented substrates, the growth of structurally consistent and stressed epitaxial layers occurs according to a layered-step mechanism with the formation of macrosteps. On vicinal substrates, the formation of monatomic growth steps was observed. The comparative characteristics of p-HEMT obtained using two types of substrates are considered.