Structural and Optical Properties of Cu-TiC Thin Films: a DFT Study
摘要
This study investigates and optimizes the structural geometry of Cu-TiC thin films using the density functional theory (DFT) framework with the local density approximation (LDA). The crystal structure, band structure, and electron density distribution of Cu and Cu-TiC (Cu in a TiC matrix) thin films are explored. The band structure of the Cu-TiC unit cell shows strong hybridization of the Cu-Ti, Cu-Cu, and Cu-C valence band regions due to antibonding states, which is also observed in molecular orbitals. Cu, Ti, and C targets are co-sputtered on Si using the DC magnetron sputtering technique. Cu (111) is the predominant phase due to the presence of Cu in the TiC phase. The lattice constant of the film is comparable to that obtained from the theoretical Cu-TiC model. However, the optical bandgap (2.09 eV) does not agree well with the simulated value (1.10 eV). Cu and Cu-TiC supercells are simulated using linear optical response theory to evaluate their optical properties.