Electrostatic Analysis and Performance Optimization of Si Doped HfO2 Ferroelectric Material Based Negative Capacitance Field Effect Transistor (NCFET)
摘要
This work explores the effect of Si doped HfO2 (Si : HfO2) ferroelectric layer (FEL) under the gate electrode on the characteristics of the Negative Capacitance Field Effect Transistor (NCFET). Due to the ferroelectric polarization of Si doped HfO2 a negative capacitance is produced in the ferroelectric region, which essentially reduces the total gate capacitance. Here we showed that the inclusion of 5 nm ferroelectric layer decreases the subthreshold swing (SS) to around 52 mV/decade, which is almost 30% lower, and decreases the threshold voltage to 0.71 V which is more than 40% lower compared to the conventional FET. Also, the On-Off current ratio increase to around