Measurements of the Spatial Distribution of Plasma Characteristics by the Langmuir Probe Method in a Hollow Cathode Discharge (Review)
摘要
This work analyzes various aspects of using probe diagnostics to measure the spatial distribution of plasma electron component characteristics in a hollow-cathode discharge. Various methods for generating the probe voltage and probe signal processing are discussed. Approaches used to determine the electron energy distribution function, plasma potential, electron density, and average electron energy are analyzed. The effect of the cylindrical Langmuir probe design on the measurement results is considered. The studies on the numerical simulation and probe measurements of plasma characteristics in various regions of the hollow-cathode discharge are reviewed. The final section discusses the results obtained at the “Tech” discharge facility in the Lebedev Physical Institute, Russian Academy of Sciences.