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Abstract <p>The paper presents the results of a study on the mass-to-charge composition of ions in the beam plasma generated during the evaporation of a solid-state ceramic target made of yttria-partially stabilized zirconia (YSZ) in an environment of inert and reactive gases by an electron beam in the forevacuum pressure range. Monitoring of the mass-to-charge composition of beam plasma ions was carried out using a modernized RGA-300 residual atmosphere mass analyzer. The influence of the working gas composition on the mass spectra of ions of the evaporated target material is shown.</p>

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The Influence of the Working Gas Composition on the Mass-to-Charge Composition of Ions in the Beam Plasma during the Evaporation of an YSZ Target by an Electron Beam

  • 期刊论文

  • 发表日期：

    2025年3月1日

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  • A. V. Tyunkov,
  • A. A. Andronov,
  • D. B. Zolotukhin,
  • T. O. Klimkin,
  • A. K. Nesterenko,
  • S. A. Salnikov,
  • Yu. G. Yushkov

摘要

Abstract

The paper presents the results of a study on the mass-to-charge composition of ions in the beam plasma generated during the evaporation of a solid-state ceramic target made of yttria-partially stabilized zirconia (YSZ) in an environment of inert and reactive gases by an electron beam in the forevacuum pressure range. Monitoring of the mass-to-charge composition of beam plasma ions was carried out using a modernized RGA-300 residual atmosphere mass analyzer. The influence of the working gas composition on the mass spectra of ions of the evaporated target material is shown.