Current Sources of Vacuum Ultraviolet Radiation: State and Prospects (A Review)

Physical principles and modern techniques for the formation of spontaneous vacuum ultraviolet radiation are described for three cases: the formation of line spectra of atoms, line spectra of multicharged ions and continuous spectra of excimer molecules. The parameters of the radiation sources are correlated with their applications: real and potential. The following schemes of the formation of vacuum ultraviolet radiation are described: H-type and E-type high frequencies discharges; discharge in a hollow cathode; glow, barrier, and arc discharges; high-voltage nanosecond discharge with a sharply inhomogeneous distribution of electric field strength in a gap; laser, discharge, and hybrid systems for multicharged ions formation; excitation of gas targets under conditions of gyrotron plasma heating. The review covers the state of the art over the last 20 years.