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Abstract <p>For a discharge with a hollow cathode in helium, a method for obtaining the EEDF by “stitching” its parts, the low-energy and high-energy components, has been proposed, each of which is determined from the measured Langmuir probe current–voltage characteristic using a filter (Savitzky–Golay or Blackman) with specially selected parameter values. The range of variation of the EEDF measured by the proposed method amounted to 4–5 orders of magnitude. The distribution function calculated by the Monte Carlo method under the experimental conditions agrees quite well with the measured one.</p>

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A New Method for Obtaining the EEDF by the Probe Technique in a Hollow Cathode Discharge in Helium

  • 期刊论文

  • 发表日期：

    2025年12月21日

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  • A. V. Bernatskiy,
  • I. I. Draganov,
  • N. A. Dyatko,
  • I. V. Kochetov,
  • V. V. Lagunov,
  • V. N. Ochkin

摘要

Abstract

For a discharge with a hollow cathode in helium, a method for obtaining the EEDF by “stitching” its parts, the low-energy and high-energy components, has been proposed, each of which is determined from the measured Langmuir probe current–voltage characteristic using a filter (Savitzky–Golay or Blackman) with specially selected parameter values. The range of variation of the EEDF measured by the proposed method amounted to 4–5 orders of magnitude. The distribution function calculated by the Monte Carlo method under the experimental conditions agrees quite well with the measured one.