Hyperspectral X-Ray Imaging For Nanometrology

A position-sensitive spectrometer with subpixel spatial resolution on the basis of a CCD camera has been implemented. The spectrometer operation is based on the proposed algorithm for real-time analysis of frames with single photon-induced events. The factors affecting the energy resolution, formation of artifacts in energy spectra, and count efficiency are analyzed. An algorithm for obtaining subpixel resolution with application of singular value decomposition is proposed. The algorithm operation has been tested on synthesized experimental data and in a live experiment with registration of the spatial and energy structure of X-ray fluorescence emission from a layered system. The application potential of hyperspectral imaging for the experimental method of X-ray standing waves in the geometry of normal incidence and grazing X-ray fluorescence emission is demonstrated.