Textured CdTe Thin Films on Silicon and Sapphire Substrates: Thermal Vapor Deposition and Structural Characterization
摘要
Abstract
CdTe thin films were grown on Si(111) and Al2O3(0001) substrates by thermal vapor deposition. The obtained films were studied by atomic-force and scanning electron microscopy, as well as by X-ray diffraction analysis. It was found that thin films of both wurtzite and sphalerite CdTe modifications can be grown on Al2O3(0001) substrates. Thin films of the sphalerite CdTe modification can be obtained on Si substrates. It was shown that the elemental composition of thin films is close to stoichiometry, and, in the case of thin films grown on Al2O3(0001), the deviation was no more than 1 at %.