Investigation of the Properties of Surface Acoustic Waves in a Lithium Niobate Single Crystal with a Silicon Dioxide Film by the Finite-Element Method

Characteristics of surface acoustic waves in lithium niobate single crystal/silicon dioxide film structures, which are used to increase the thermal stability of acoustoelectric devices on single-crystal substrates, have been calculated. The simulation has been performed by the finite-element method using the COMSOL software, and the velocity, electromechanical coupling coefficient, and temperature coefficient of frequency in the structures with lithium niobate of different cuts have been calculated. A good agreement is observed between the results obtained and the data in the literature. The obtained parameters are of practical importance for developing various acoustoelectric devices.