Predictive Analysis of Microcircuits’ Radiation Hardness in the Fabrication Process. I. System and Implementation Algorithms for Various Product Categories

An analysis of the monitoring of the current system of radiation hardness (RH) shows that in order to work effectively, the RH needs to be monitored during fabrication, taking into account the features of each stage of the life cycle of microelectronic products. In this study an approach is proposed to provide predictive control of the stability of the RH of microelectronic products in the production process, taking into account the category of RH of each type of microcircuit. It is shown that the developed basic algorithms for the predictive control of the stability of the RH of microcircuits in mass production for each of the categories of RH guarantee the necessary completeness, reliability, and information control, while minimizing the technical and economic costs and the volume of radiation tests.