Development of a Behavioral Macro-Model for Silicon Piezoresistive Pressure Sensor

Abstract—The paper explores the origins of offset voltage in piezoresistive pressure sensors, focusing on the impact of external factors such as temperature and internal factors like doping on sensor behavior. The study constructs a behavioral macro-model of a piezoresistive pressure sensor using the PSPICE simulator, leveraging primitives from the SPICE library. The investigation particularly addresses the offset voltage, a common issue in pressure measurements that can introduce inaccuracies. By understanding and mitigating these factors, the study aims to enhance the precision and reliability of piezoresistive pressure sensors for various applications.