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Abstract <p>High-frequency grid-type ion source with a high-frequency neutralizer is developed for use in an industrial plant for applying precision optical coatings. The geometric parameters of the ion-extraction system are determined by analyzing the numerically calculated ion trajectories.</p>

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HF Ion Source for Application in Optical Surface Coating Technology

  • 期刊论文

  • 发表日期：

    2026年4月1日

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  • V. K. Abgaryan,
  • R. V. Akhmetzhanov,
  • D. S. Demchenko,
  • V. G. Zhupanov,
  • E. A. Leonova,
  • A. V. Melnikov,
  • A. I. Mogulkin,
  • O. D. Peisakhovich,
  • D. B. Pushkin,
  • E. V. Svetlichnaya

摘要

Abstract

High-frequency grid-type ion source with a high-frequency neutralizer is developed for use in an industrial plant for applying precision optical coatings. The geometric parameters of the ion-extraction system are determined by analyzing the numerically calculated ion trajectories.