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Abstract <p>Main problems of scanning electron microscopy which arise when working with low energies of electron probes are discussed. Ways of updating parameters of low-voltage electron microscopes through the development of mathematical simulation methods and software for optimizing electron-optical schemes of these microscopes are considered in detail.</p>

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Scanning Electron Microscopy Problems and Modern Approaches to Their Solution

  • 期刊论文

  • 发表日期：

    2026年4月1日

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  • A. A. Trubitsyn,
  • S. L. Andrianov,
  • A. M. Gordienko,
  • E. Yu. Grachev,
  • D. V. Kiryushin,
  • E. A. Kozlov

摘要

Abstract

Main problems of scanning electron microscopy which arise when working with low energies of electron probes are discussed. Ways of updating parameters of low-voltage electron microscopes through the development of mathematical simulation methods and software for optimizing electron-optical schemes of these microscopes are considered in detail.