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Abstract <p>Linear structures ordered into bands were found when studying the morphology of the surface of carbon films consisting of arrays of multiwalled nanotubes. Their geometric parameters were measured, and it was shown that they reflect “frozen” fluctuations in the density of the sputtered material flow, which depend on the mode of operation of the sputtering unit.</p>

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Features of the Surface Morphology of a CNx:EuyOz Film Obtained Using a DC Magnetron

  • 期刊论文

  • 发表日期：

    2025年11月7日

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  • V. V. Nedyorkin,
  • A. S. Lavrenyuk,
  • E. I. Shemchenko

摘要

Abstract

Linear structures ordered into bands were found when studying the morphology of the surface of carbon films consisting of arrays of multiwalled nanotubes. Their geometric parameters were measured, and it was shown that they reflect “frozen” fluctuations in the density of the sputtered material flow, which depend on the mode of operation of the sputtering unit.