Review of Modern Domestic Pumps for the Ultra-High Vacuums in Beam Accelerators and Nuclear Fusion Devices
摘要
Abstract
The authors consider domestic modern pumps based on non-evaporable getters and ion-getter pumps for obtaining ultrahigh vacuums at the level of 10−11 Torr. Experimental results from measuring pumping speed as a function of gas pressure are presented for different types of ion-getter pump. The pumping speeds of pumps based on non-evaporable getters for H2, CO, and D2 are also measured.