Towards High Precision Laser Nanostructuring of CsPbBr₃ Perovskite with UV Femtosecond Laser Pulses

Laser patterning technologies for halide perovskite materials have recently shown significant progress due to their optimal combination of cost, performance and resolution. Nevertheless, due to the relative novelty of the material, some aspects of laser structuring of perovskites have not yet been studied. Some of the most important parameters of the fabrication method is the roughness of the treated surface and the number of structural defects that negatively affect the characteristics of manufactured devices. This paper presents for the first time the results of laser structuring of CsPbBr₃ perovskite microcrystals using ultraviolet femtosecond radiation with a wavelength of 257 nm. The possibility of creating structures on the surface of single microcrystals with submicrometer resolution without visible deterioration of the photoluminescent properties of the material, despite the high photosensitivity of the material to this wavelength range, is shown. The created structures have an extremely low roughness comparable to the roughness of the initial surface of monocrystals, which is unusual for direct laser ablation processing methods and has great potential for fabrication of perovskite nanophotonics elements.