Effect of Annealing on the Lateral Homogeneity of Ti/InAlAs Schottky Barriers

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发表日期：

2024年9月1日

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I. Yu. Genze,
M. S. Aksenov,
D. V. Dmitriev

摘要

Abstract

The authors study the effect the temperature (300–450°C) and period (0–20 min) of annealing have on the parameters (barrier height and ideality factor) and homogeneity of Au/Pt/Ti/i(n)‒In_0.52Al_0.48As(001) Schottky barriers. The homogeneity of the Schottky barriers is determined by analyzing the temperature dependences of their parameters in the range of 80–350 K and the Richardson plots in the Tung model.