Arc-PVD Coating Thickness Uniformity Improving on Complex Geometry Surfaces
摘要
Abstract
We presented the algorithm for ARC-PVD coating thickness calculation and rotation speed optimization. This approach was used to improve the coating thickness uniformity of complex surface samples. Established that the selected rotation speed increased the thickness uniformity from 0.5–9 µm range to 2–8.5 µm. Microhardness increased by an average of 30% compared with basic rotation speed. Scratch tests and roughness measurement did not have any significant changes.