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Abstract <p>Deep X-ray lithography using synchrotron radiation has great potential for the fabrication of a wide range of microdevices of key functional components for various fields of science and industry that require extreme resolution and a large aspect ratio, that is, the size of the structure and its depth. As hardware systems, they affect many leading industries, including automotive, electronics, information systems, energy and environment, fine chemical engineering, medicine, and biology. The state of affairs is analyzed, and the problems that partially led to the dismantling of industrial LIGA channels at some synchrotrons in Europe and Asia are considered. Works on deep X-ray lithography at Russian synchrotrons are considered.</p>

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Deep X-ray Lithography: A Brief Review

  • 期刊论文

  • 发表日期：

    2025年12月1日

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  • V. G. Stankevich,
  • N. V. Marchenkov,
  • N. Yu. Svechnikov,
  • K. A. Menshikov,
  • M. S. Goncharenko

摘要

Abstract

Deep X-ray lithography using synchrotron radiation has great potential for the fabrication of a wide range of microdevices of key functional components for various fields of science and industry that require extreme resolution and a large aspect ratio, that is, the size of the structure and its depth. As hardware systems, they affect many leading industries, including automotive, electronics, information systems, energy and environment, fine chemical engineering, medicine, and biology. The state of affairs is analyzed, and the problems that partially led to the dismantling of industrial LIGA channels at some synchrotrons in Europe and Asia are considered. Works on deep X-ray lithography at Russian synchrotrons are considered.