Effect of Electron Irradiation on the Parameters of Gallium Nitride in a Wide Temperature Range
摘要
When irradiating n-GaN obtained by the method of metal organic vapor phase epitaxy (MOVPE) with electrons with an energy of 0.9 MeV, the values of the carrier removal rate ηe for room temperature were established for the first time within the framework of the Van der Pauw method. At an initial (before irradiation) electron concentration of 1.87 × 1017 cm–3, the values of ηe were 0.023 and 0.054 cm–1 at room temperature (293 K) for doses Φn = 1.7 × 1017 and 3.7 × 1017 cm–2, respectively. With temperature decrease, the ηe value increases: at T = –55°C, the ηe values are 0.064 and 0.086 cm–1 for doses of 1.7 × 1017 and 3.7 × 1017 cm–2, respectively. The maximum mobility value in nonirradiated samples is 650 cm2/Vs. After irradiation with a dose of Φn = 3.7 × 1017 cm–2, the maximum mobility value decreases to 530 cm2/Vs. The change in mobility under the influence of irradiation is reliably traced at temperatures of T ≤ 260 K (1000/T ≈ 3.85).