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Abstract <p>The first results of combined deposition of coatings from a beam of accelerated C<sub>60</sub> fullerene ions and fluoroplastic vapor (polymerized tetrafluoroethylene, PTFE) are presented. The coatings were formed by condensation of thermally evaporated PTFE on a Si substrate in vacuum under irradiation with a C<sub>60</sub> ion beam with an energy of 5 keV passed through a mass spectrometer. The calculated ratio of C<sub>60</sub> ions and molecular fragments condensing on the substrate (–CF<sub>2</sub>–CF<sub>2</sub>–) was chosen close to 1 : 1. The structure of the coatings and chemical bonds have been studied by Raman scattering and X-ray photoelectron spectroscopy, according to which the coating contains about 8.6 at % fluorine. The coating contains ~35% <i>sp</i><sup>3</sup> bonds, with a <i>sp</i><sup>3</sup>/<i>sp</i><sup>2</sup> ratio of ~0.76, and the main part (up to 50%) of fluorine–carbon bonds is concentrated in the form of polymer chains –CF<sub>2</sub>–CF<sub>2</sub>–, which are located in a solid carbon matrix; that is, the coating structure is a nanocomposite. Mechanical tests showed high hardness of the coating <i>H</i> ~ 32 GPa with an <i>H</i>/<i>E</i> ratio of ~0.16 (<i>E</i> is Young’s modulus). The coating is characterized by a high contact angle of wetting with distilled water (CA = 98°). Tribological tests showed a coefficient of friction close to 0.18, with low wear of less than 10<sup>–7</sup> mm<sup>3</sup>/(N m).</p>

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Changes in the Structure and Properties of Fluorocarbon Coatings under Irradiation with Accelerated C60 Ions

  • 期刊论文

  • 发表日期：

    2025年6月1日

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  • V. E. Pukha,
  • G. V. Nechaev,
  • E. N. Kabachkov,
  • I. N. Lukina,
  • E. I. Drozdova,
  • O. P. Chernogorova

摘要

Abstract

The first results of combined deposition of coatings from a beam of accelerated C60 fullerene ions and fluoroplastic vapor (polymerized tetrafluoroethylene, PTFE) are presented. The coatings were formed by condensation of thermally evaporated PTFE on a Si substrate in vacuum under irradiation with a C60 ion beam with an energy of 5 keV passed through a mass spectrometer. The calculated ratio of C60 ions and molecular fragments condensing on the substrate (–CF2–CF2–) was chosen close to 1 : 1. The structure of the coatings and chemical bonds have been studied by Raman scattering and X-ray photoelectron spectroscopy, according to which the coating contains about 8.6 at % fluorine. The coating contains ~35% sp3 bonds, with a sp3/sp2 ratio of ~0.76, and the main part (up to 50%) of fluorine–carbon bonds is concentrated in the form of polymer chains –CF2–CF2–, which are located in a solid carbon matrix; that is, the coating structure is a nanocomposite. Mechanical tests showed high hardness of the coating H ~ 32 GPa with an H/E ratio of ~0.16 (E is Young’s modulus). The coating is characterized by a high contact angle of wetting with distilled water (CA = 98°). Tribological tests showed a coefficient of friction close to 0.18, with low wear of less than 10–7 mm3/(N m).