High-Resolution X-Ray Micro-Optics: Technologies and Materials
摘要
Abstract
The prospects for using high-resolution X-ray microlenses for coherent visualization tasks are discussed. Modern technologies and methods of microprocessing for the manufacture of 2D microlenses are considered using laser systems, ion-beam lithography, and additive technologies as an example. The efficiency of various materials for X-ray micro-optics applications is evaluated, and the time spent on manufacturing 100 nm resolution micro objectives using ion-beam lithography systems is optimized.