Structure and Properties of TiN–Cu Composite Coatings on T15K6 Alloy Obtained by Vacuum-Arc Evaporation and Magnetron Sputtering
摘要
Abstract
The features of the formation of TiN–Cu composite coatings using the hybrid method of vacuum-arc evaporation of titanium and magnetron sputtering of copper are considered. It has been shown that under the selected conditions for the TiN synthesis copper does not form chemical compounds with titanium and nitrogen. The structure and properties of TiN–Cu composite coatings are examined. The introduction of copper into the coating composition leads to the grinding of the nitride phase crystallites. A maximum microhardness of coatings of 37–41 GPa is achieved at a copper concentration of ~3–7 at %. The technological parameters allowing the application of wear-resistant functional TiN–Cu coatings on T15K6 alloy substrates have been determined.