Determination of the Ion–Solid Interaction Potential from Experiment and Its Effect on the Profiles of Implanted Particles
摘要
Abstract
Based on analysis of the angular distributions of particles passing through thin gold films, the parameters of a potential that best describe the experiment are obtained. The resulting potential differs from the potential describing collisions in the gas phase by a noticeable change in the screening constant. The effect of the collision energy, selection of the potential, and the model of the electronic stopping power on the depth distribution of implanted particles is analyzed.