Investigation of Optical Coating Properties Based on a Simplified Deposition Process Simulator
摘要
Abstract
Properties of optical coatings are studied on the basis of a simplified simulator of errors in the coating layer thicknesses in the course of their depositing. This approach is justified. Analytical estimates of the mean-root-square value of the norm of the error vector and the degree of error correlation in the coating layer thicknesses are derived. The dependence of the mean-root-square value of the norm of the error vector and coating properties on the level of random errors in layers is studied.