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Abstract <p>The article is devoted to the theoretical study of chemical reactions occurring in the first step of the pyrolytic decomposition of the methylchlorosilane molecule. The most probable decomposition reactions of methylchlorosilane and their mechanisms were identified, a thermodynamic calculation of the products and transition state structures at different temperatures was performed, and the equilibrium and rate constants of the reactions were calculated.</p>

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The First Step of the Pyrolytic Decomposition of Methylchlorosilane

  • 期刊论文

  • 发表日期：

    2025年4月1日

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  • D. V. Sidorov,
  • A. A. Grunin,
  • A. D. Kirilin,
  • A. A. Shavnev

摘要

Abstract

The article is devoted to the theoretical study of chemical reactions occurring in the first step of the pyrolytic decomposition of the methylchlorosilane molecule. The most probable decomposition reactions of methylchlorosilane and their mechanisms were identified, a thermodynamic calculation of the products and transition state structures at different temperatures was performed, and the equilibrium and rate constants of the reactions were calculated.