Analysis of the Influence of Technological Parameters on the Properties of Transparent Conductive Oxides

A model in the form of an oriented graph is developed, displaying the interrelations of technological modes and quality parameters of transparent conductive coatings. The model makes it possible to systematize the factors affecting the process and propose an analytical description of the effect parameters, the reactions to them, and the properties of the synthesized coatings in the form of a system of differential equations. Based on the specified mathematical model of the relationship between technological modes and coating properties, a method for selecting optimal technological parameters is developed in order to obtain transparent conductive coatings with specified properties. The achieved results can be used in technological processes for synthesizing transparent conductive coatings with specified properties.