Structural State and Composition of Zr–Y–O Ceramic Coatings Fabricated by Magnetron Plasmachemical Deposition

The structure and chemical composition of the ceramic layers of thermal barrier coatings, which are deposited by medium-frequency magnetron plasmachemical deposition, electron-beam physical vapor deposition, and atmospheric plasma sputtering, are studied. The magnetron coatings are shown to have a columnar structure, which is similar to that of the electron-beam coating, and horizontal boundaries related to the peculiarities of the deposition process. The results of energy dispersive spectroscopy demonstrate that the oxygen content in the magnetron coating turns out to be highest, exceeding the calculated value by about 5%.