Formation of Medical-Purpose Layered CeO₂–TiNbTaZr Composite Materials by Magnetron Sputtering

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发表日期：

2024年2月1日

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E. O. Nasakina,
M. A. Sudarchikova,
A. S. Baikin,
A. A. Mel’nikova,
K. Yu. Demin,
N. A. Dormidontov,
P. A. Prokof’ev,
S. V. Konushkin,
K. V. Sergienko,
M. A. Kaplan,
M. A. Sevost’yanov,
A. G. Kolmakov

摘要

Abstract

The structure, morphology, and hardness of the CeO₂ surface layer formed on a Ti–29Nb–13Ta–4.6Zr alloy plate by magnetron sputtering at different process parameters are studied. Under the chosen conditions, a CeO₂ layer having the stoichiometric composition (with the fluorite-type structure, space group Fm \(\bar {3}\) m) is found to form. We detected a linear dependence of the surface layer thickness on the sputtering time and an extreme (with a maximum) power dependence of the thickness. As the thickness increases, the decrease in the hardness of the CeO₂ layer is noted. At low coating thicknesses (to 720 nm), the formation of a TiO₂ sublayer is observed.

Formation of Medical-Purpose Layered CeO2–TiNbTaZr Composite Materials by Magnetron Sputtering

摘要

Formation of Medical-Purpose Layered CeO₂–TiNbTaZr Composite Materials by Magnetron Sputtering